We will introduce the technologies and processing examples we propose based on the work material, film type, and film thickness!
"Vapor phase technology" is utilized in various fields such as 'new materials and substances' and 'energy' including resin raw materials and fuel cells, as well as in 'medical and healthcare' applications like medical sensors and devices, and in 'mobile devices', 'wearable devices', and 'automotive' sectors including electronic components and new displays.
Additionally, it achieves film formation in the range of 1nm to 1000nm with diverse processes, film thicknesses, and types. Coating is performed using deposition methods such as evaporation, CVD, ALD, and sputtering.
【Features】
■ ALD Robot CVA series
Enables high-quality film formation at low temperatures, which is considered difficult in ALD.
■ Barrel-type ALD Robot CVA-B series
A fusion of low-temperature ALD equipment and barrel mechanism.
■ Low-temperature high-frequency excitation DLC film formation device CVC series
Allows for good adhesion film formation from graphite to DLC at low temperatures.
■ Bubbling CVD Robot CVB series
Liquid to gas
Enables low-cost and high-quality film formation at low temperatures.
■ IBAD (Ion Beam Assisted Deposition) CVI series
Examples of contract film formation using IBAD
Allows for low-energy irradiation at low temperatures, improving the adhesion of transparent conductive films (Zn O) and high-melting-point metal electrode formation for touch panels.
